The hairpin microstrip band-pass filters parameters are designed and optimized with electromagnetic simulation software high frequency structure simulator（ HFSS）. X-band microstrip band-pass filters with center frequency of 8. 6 GHz and bandwidth of 9 % are fabricated on the MEMS processing platform by using highresistance silicon as substrate and large thickness benzocyclobutene（ BCB） with low dissipation factor as dielectric.The detailed process is given and the key steps are introduced. Comparison of simulation result and test result are given. Test result consistents with the simulation result very well and the filters have good transmission performance

which can meet the communication requirements in the frequency range of 8. 2 ～ 9. 0 GHz. This shows that the design method is reasonable and suitable for engineering applications.