In micro-electro-mechanical system（ MEMS） devices such as field programmable gate array（ FPGA）micro-resonators

most processing circuit need to acquire amplitude and phase information of the signal to be detected at the same time. To meet this requirement

a complete design scheme of vector signal analysis system based on FPGA is proposed

a vector signal analysis system which is low-cost

and convenient for system integration is developed. Modular hardware circuit is designed and FPGA program is used for vector signal analysis. After experimental testing

the obtained vector signal analysis system has many advantages such as good linearity

high precision and low error

which can conveniently and accurately conduct vectorial analysis of the measured signal and can meet the application requirements of MEMS devices.