Compared with traditional electrostatic micro-actuator

electrostatic micro-actuator based on self-excited vibration has advantage of larger output displacement and high-order vibration is observed in working. In order to research on high-order vibration

numerical simulation is conducted. According to whether cantilever in actuator contacts with electrodes

the vibration of cantilever is divided into two phases. When impact between cantilever and electrodes occur

the momentum balance method is applied to construct model. When cantilever vibrates between electrodes

bending equations of Euler-Bernoulli beam is used for solution. Control equation is solved using the numerical method through MATLAB

deflection-position curves at different moments of time are calculated. The oscillation mode solved by numerical simulation is corresponding to experiment. The frequency jumps is also observed in numerical simulation just as occurred in experiment.