A design of quartz resonant vacuum sensor（ QRVS） with two-resonant parameters based on gas transportation phenomenon is proposed. Its main differences with the traditional QRVS are stated as the follows:（ zyw）-18°15’ cut type quartz crystal tuning folk sheet is used in the QRVS

and the QRVS is not set any type of electrodes on its quartz tuning fork sheet which " a piezo-resonant tuning fork with no electrodes " is called.Resonance sensitive mechanism with two-parameter that are resonance frequency and equivalent series resistance are used

and ratio of thickness of tuning to distance between the two tuning arms

t/g is 10. In order to increase mec

hanical friction damping of residual gas in vacuum with fork arms

and four ventilated grooves on the upper end of the arm are prepared. In order to suppress spurious vibration modes

improve the quality factor Q value

and mechanical fatigue life of the fork arm root

the semicircular steps at the edge of two fork arms and 2

5 rectangular grooves in isolating support region are made

respectively. The measured data of typical samples of QRVS show that range of vacuum measurement is 10

-3

105 Pa

resolution of vacuum measurement is 3 × 10

-3

Pa

accuracy of vacuum measurement is 10 % F. S

stability is 1. 5 × 10

-3

Pa

fully meet the design requirements.