Based on silicon-based disc resonator gyroscope

a kind of metallic multi-ring disc resonator gyroscope（ MMDRG） is presented

which can be achieved at a lower cost and under lower temperature by using electroplating technology. Through researching on working principle

as well as detecting and driving methods of microgyro

structure of metallic multi-ring DRG is designed. The dynamic simulation is applied on the gyroscope to verify feasibility by using the finite element method. The process flow is designed to achieve the micro gyroscope chip. The research solves the key technology to realize the metallic multi-ring disc resonator gyroscope.