For testing silicon micro resonant pressure sensor with high efficiency and precision

a testing method of frequency characteristics based on multi-frequency scanning is presented. Multi-frequency scanning signals are superimposed by digital circuit and act as driving signal to realize frequency characteristic measurement

with high precision and high efficiency. The multi-frequency scanning testing system with FPGA as the core part is built

and4 sine frequency scanning signal is superimposed. The experimental result shows that the precision of multifrequency scanning test is basically the same as steady-state scanning test

but it improves the efficiency by4 times. The multi-frequency scanning test method can greatly improve the testing efficiency on the premise of test precision

and can meet the testing requirements of high Q value sensor as well as its mass production better.