By comprehensive analysis on working principle of micro F-P cavity filter

the optimum tuning scheme of micro F-P cavity filter is established. The main part of the optical structure is designed

a multilayer film structures of the mirror is established

and with the help of ANSYS finite element electro-mechanical coupling analysis

L type bridge arm supported cavity structure is finally established

the structure can achieve a considerable range of tuning 0.625 μm; relatively high fill factor

filter light leakage is avoided; the high ability to keep parallel can achieve high precision filtering effect; structural stability can resist the residual stress of manufacture.