Aiming at problem of hysteresis nonlinearity of piezoelectric ceramic actuator in ultra precise micro displacement system

a nonlinear hysteresis modeling method based on genetic back propagation（ BP） neural network is proposed. Get the piezoelectric actuator corresponding displacement values under different voltage values by current eddy displacement sensor; secondly

mathematical model of hysteresis is obtained using six polynomial fitting

so as to establish hysteresis model based on genetic BP neural network. Experimental results show that the maximum error of the hysteresis model is and the average absolute error is. It shows that the hysteresis model can reflect the hysteresis characteristics of piezoelectric actuator accurately

and provides a theoretical basis for the design of micro displacement control system.