A combination of piezoelectric effect and electromagnetic effect micro power generator is presented

of which the foundation structure is PZT-based eight cantilever beams

mass block with Au coil and Nd Fe B permanent magnets. The structural mechanic characteristic of the device is analyzed by finite element analysis software ANSYS. The first-order resonant frequency is estimated to be 214. 7 Hz

pretty suggestive for the later test. The micromachining process is constituted and the mask layout of micro power generator is designed using LEdit. Satisfactory heterogeneous integrated manufacturing of PZT piezoelectric films（

3 529 nm） on the Pt/Ti/SiO

2

/Si/SiO

2

substrate is obtained with sol-gel technology

complete one key step in the whole producing process. The dielectric properties test show that PZT thick film has the double butterfly shape polarization reversal peak

high dielectric properties and compression strength. The electric hysteresis loop of PZT thick film is measured in400 k V/cm

which reveal good ferroelectric properties with residual polarization Pr（ 37. 7 μC/cm2） and coercive field（ 41. 2 k V/cm）.