An electrostatic comb driver used for adjustable Ga N micro mirror is proposed and designed. By using FEM software

structure model is constructed for the device and the structure of the comb driver is simulated and optimized. Besides

fabricate comb micro driver used for Ga N-on-Si using micro-electro-mechanical system（ MEMS） process and driving characteristic of electrostatic comb driver is test. Test result demonstrates that the displacement of the driver has a quadratic relation with drive voltage which is consistent with simulation result.Drive displacement of the proposed micro actuator is 1. 08 μm under driving voltage of 200 V.