A kind of pulse width modulation temperature sensor is designed. Instead of conventional long delay array

a cyclic delay array is used. To improve precision of temperature sensor

a process error calibration is proposed

on the basis of analyzing the generation principle of process error. The error calibration circuit is implemented by FPGA. The verification results show that the calibration function can be realized and the results can meet the requirements. The circuit is fabricated by SMIC 0. 18 CMOS standard process

the simulation results indicate that the temperature senor achieves a resolution of 1℃/LSB at range of-20

60℃.