Aiming at problem that flow of μL / min level is difficult to measure in low-velocity seepage experiment

a slow flow measurement method using electrolytic polarization tracing is proposed. The measuring principle

structure and control circuit for the sensor are introduced. A flow sensor with the range of 10

100 μL /min is made

and using monolithic electroosmotic pump

flow measurment experiment is conducted. The results show that the sensor has simple structure and small size. At the range of 10

60 μL / min

the linear correlation of sensor is greater than 0. 998. The sensor can meet requirement of low-velocity seepage experiment and has good practical value.