In order to detect good products and defective goods in hundreds of MEMS scanning mirrors on a silicon wafer fastly and accurately

an automatic test system is designed.A high precision 2D PSD equipment is chosen

rear hardware circuit of PSD is designed and its data collection program is compiled.Build up automatic detection system combined with angles measuring theory of classical triangulation method

experiment for optical performance detection of MEMS scanning mirrors are implemented at room temperature and under ambient light.Results indicate that this system can detect two axis of the scanning mirror and give out the result.