Start with structure parameter design of sensitive chip of integrated acceleration sensor

and analyze influence of sensitive chip structural parameters

such as thickness of supporting beam

initial gap of capacitor

and quality block on sensitivity

nonlinearity of sensor. Structure analysis software ANSYS is used for simulation analysis

meanwhile

structure parameter of the optimized sensitive chip is verified

result shows that

with the optimized sensitive chip

sensitivity of acceleration sensor can reach above 10 m V / gn

and nonlinearity of acceleration sensor is better than 2 %.