Microsphere probe is an important part of micro/nano precision measuring instruments

and it is widely applied in field of micromachining and precision measurement. In order to conveniently fabricate microsphere probes

a laser beam machining system for rapid fabricating microsphere probes is designed. The laser beam machining system is mainly composed of four parts

which are laser light source

laser controller

beam adjustment component and mechanical positioning components. By using the system

microsphere probe with a good ball tip is fabricated. Experimental results show that laser beam machining system can satisfy requirement of rapid fabricating microsphere probes.