Vibration energy harvester is widely used in power supply of micro-electro-mechanical system（ MEMS）devices because of characteristics of small size

long lifetime and high energy density. Three types of vibration energy harvesters with different bandwidth

which are single resonant frequency

wide frequency

and frequency tunable type

are introduced from the aspect of frequency

and advantages

disadvantages

currently situation at home and abroad and future development trends of these structures are systematically introduced. The single resonant frequency energy harvesting structure is the simplest among them and has relatively mature technology

which has been researched for a long time. While broadband structure and frequency tunable structure have become hot topics of research because they are more suitable for external environmental vibration condition.