ZHONG Ji, ZHOU Guo-ping, HUANG Feng, et al. Design of high precision thin film width control instrument based on FPGA[J]. 2016, 35(5): 94-96. DOI: 10.13873/J.1000-9787(2016)05-0094-03.
基于FPGA的高精度薄膜宽度控制仪设计
摘要
为了达到薄膜生产指标
利用线阵电荷耦合器件(CCD)进行数据采集测量
反射式红外光电传感器作为反馈控制
并以现场可编程门阵列(FPGA)为核心控制器
设计出一种高精度薄膜宽度控制仪。该装置能在精确检测出生产薄膜的宽度同时
将其与生产要求的设定值进行比较
实现对充气开关进行控制。通过实验分析
该系统提高了整个生产过程的精度和可靠性。
Abstract
In order to achieve index of thin film production
using linear array CCD to carry out data acquisition and measurement
reflective infrared photoelectric sensor as feedback control
and field programmable gate array( FPGA) is used as core controller
design a high precision thin film width control instrument. The device can detect width of the produced thin film accurately
at the same time
compare it with setting value of production requirements
then realize pneumatic switch control. Through experimental analysis
the system improves precision and reliability of the whole production process.