接触式扫描过程中探针-样品赫兹耦合的建模与分析

陈伟; 许斌; 赵世平

doi:10.13873/J.1000-9787(2016)03-0012-04

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接触式扫描过程中探针-样品赫兹耦合的建模与分析

研究与探讨 | 更新时间：2025-09-11

- 接触式扫描过程中探针-样品赫兹耦合的建模与分析
- Modeling and analysis of probe-sample Hertz coupling in contact scanning
- 传感器与微系统 2016年35卷第3期页码：12-15
- 作者机构：
  
  四川大学制造科学与工程学院
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目（51405314）;中国物理研究院超精密加工技术重点实验室开放基金资助项目（KF15004）;中央高校基本科研业务费资助项目（2015SCU04A12）
- DOI：10.13873/J.1000-9787(2016)03-0012-04
  中图分类号： TB302
- 纸质出版：2016
- 稿件说明：
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[1]陈伟,许斌,赵世平.接触式扫描过程中探针-样品赫兹耦合的建模与分析[J].传感器与微系统,2016,35(03):12-15.

CHEN Wei, XU Bin, ZHAO Shi-ping. Modeling and analysis of probe-sample Hertz coupling in contact scanning[J]. 2016, 35(3): 12-15.
[1]陈伟,许斌,赵世平.接触式扫描过程中探针-样品赫兹耦合的建模与分析[J].传感器与微系统,2016,35(03):12-15. DOI： 10.13873/J.1000-9787(2016)03-0012-04.

CHEN Wei, XU Bin, ZHAO Shi-ping. Modeling and analysis of probe-sample Hertz coupling in contact scanning[J]. 2016, 35(3): 12-15. DOI： 10.13873/J.1000-9787(2016)03-0012-04.

摘要

随着微器件测量系统中微测头尺寸不断减小和测量精度不断提高

微纳测量中测头—样品间的形变误差对系统不确定度的影响是不能忽略的。为了研究二者间的相互作用和形变问题

根据材料应力—应变属性和赫兹理论

建立了微测球与样品的接触模型

并以玻璃测头和光学器件为分析对象

探讨了测量力、测球半径、样品曲率半径以及不同材质样品等对形变、形变区域半宽长度及最大赫兹应力的影响。结果表明:测球半径与样品曲率半径的作用机理相似

而且相较于探针测球半径因素

测量力和被测样品不同曲率半径因素对探针—样品间形变的影响更为显著。

Abstract

As the size of probe used for micro-component measurement system is decreased continuously and measurement precision is increased constantly

influence of deformation error between probe and measurement sample on uncertainty of system is becoming an issue that can not be ignored. In order to research interaction between probe and sample and deformation problems

contact model for micro measuring ball and sample is established according to stress-strain properties of materials and Hertz theory

glass probe and optical devices are used as analysis target

effect of measurement force

probe radius

curvature radius of sample and samples with different materials on deformation

half width length of deformation zone and the maximum Hertz stress. Results show that interaction mechanism of curvature radius of measured sample and measuring ball radius is similar

and compared with probe radius factor

effect of measurement force and curvature radius factor of measured sample on deformation between probe and ample is more obvious.

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Keywords

references

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