CHANG Chi, ZHU Ge, FU Min, et al. Design of time-grating displacement sensor based on light field coupling[J]. 2016, 35(2): 113-115+119. DOI: 10.13873/J.1000-9787(2016)02-0113-03.
In order to achieve displacement measurement of low cost
easy processing and high-precision
timegrating displacement sensor of light field coupling is designed. The measurement principle of displacement sensor
which uses electric standing waves based on alternating light field to synthesize electric traveling wave signal
and achieves spatial displacement conversion by means of phase discrimination
is illustrated; structural design of sensor is completed
system block diagram is given and function of signal processing circuit is specifically analyzed. Experimental results show that measurement error of time-grating displacement sensor of light field coupling can reach to ± 0. 5 μm at range of 108 mm.