基于旋转谐振结构的单芯片二维电场传感器

王宇; 方东明; 陈博; 彭春荣; 夏善红

doi:10.13873/J.1000-9787(2016)02-0103-03

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基于旋转谐振结构的单芯片二维电场传感器

设计与制造 | 更新时间：2025-09-11

- 基于旋转谐振结构的单芯片二维电场传感器
- Monolithic two-dimensional electric field sensor based on rotary resonant structure
- 传感器与微系统 2016年35卷第2期页码：103-105+112
- 作者机构：
  
  1. 中国科学院电子学研究所传感技术国家重点实验室
  2. 中国科学院大学
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目（61201078,61327810）
- DOI：10.13873/J.1000-9787(2016)02-0103-03
  中图分类号： TP212
- 纸质出版：2016
- 稿件说明：
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[1]王宇,方东明,陈博,彭春荣,夏善红.基于旋转谐振结构的单芯片二维电场传感器[J].传感器与微系统,2016,35(02):103-105+112.

WANG Yu, FANG Dong-ming, CHEN Bo, et al. Monolithic two-dimensional electric field sensor based on rotary resonant structure[J]. 2016, 35(2): 103-105+112.
[1]王宇,方东明,陈博,彭春荣,夏善红.基于旋转谐振结构的单芯片二维电场传感器[J].传感器与微系统,2016,35(02):103-105+112. DOI： 10.13873/J.1000-9787(2016)02-0103-03.

WANG Yu, FANG Dong-ming, CHEN Bo, et al. Monolithic two-dimensional electric field sensor based on rotary resonant structure[J]. 2016, 35(2): 103-105+112. DOI： 10.13873/J.1000-9787(2016)02-0103-03.

摘要

提出并研制了一种二维电场检测传感芯片

将四个电场测量微型单元和旋转式驱动微结构集成在3.5 mm×3.5 mm的敏感结构上

实现了单芯片的电场二维测量。介绍了传感器的工作原理、敏感结构的设计

以及基于绝缘体上硅（SOI）工艺的单芯片微型二维电场传感器制备工艺技术。成功研制出传感器原理样机

研究了微型二维电场传感器的标定方法

开发了用于电场二维标定的测试装置

并在室温常压下对传感器进行了二维标定。实验结果表明:该传感器能够有效减小电场的轴间耦合干扰

测量误差优于7.04%

线性度可达到1.25%。

Abstract

A two-dimensional electric field detecting sensing chip is presented

researched and fabricated

which integrates four electric field measurement micro unit and rotary driving micro structure on 3. 5 mm × 3. 5 mm sensitive structure to realize monolithic two-dimensional electric field measurement. Working principle of the sensor

design of sensing structure and fabrication technology of monolithic two-dimensional electric field micro sensor based on SOI process are introduced. The prototype of the proposed sensor is successfully fabricated

and the calibration method and the calibration equipment are developed to conduct two-dimensional calibration experiments at room temperature and ordinary pressure. The test results show that the proposed sensor effectively eliminates the cross-axis coupling interference of electric field

and measurement error is prior to 7. 04 %

and the linearity can achieve 1. 25 %.

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references

基于共面去耦结构的空间三维电场测量方法 [J]. 闻小龙,彭春荣,方东明,杨鹏飞,陈博,夏善红. 电子与信息学报 . 2014(10)

The application of lightning forecasting based on surface electrostatic field observations and radar data [J] . Qingfeng Zeng,Zhenhui Wang,Fengxia Guo,Minxue Feng,Shenghui Zhou,Hao Wang,Dongpu Xu. Journal of Electrostatics . 2013 (1)

Characteristics of the initial rising portion of near and far lightning return stroke electric field waveforms [J] . A. Nag,V.A. Rakov,D. Tsalikis,J.S. Howard,C.J. Biagi,J.D. Hill,M.A. Uman,D.M. Jordan. Atmospheric Research . 2011

On the lightning hazard warning using electrostatic field: Analysis of summer thunderstorms in Spain [J] . Daniel Aranguren,Joan Montanya,Gloria Solá,Victor March,David Romero,Horacio Torres. Journal of Electrostatics . 2009 (2)

Thermally driven micro-electrostatic fieldmeter [J] . Xianxiang Chen,Chunrong Peng,Hu Tao,Chao Ye,Qiang Bai,Shaofeng Chen,Shanhong Xia. Sensors & Actuators: A. Physical . 2006 (2)

A micro-aperture electrostatic field mill based on MEMS technology [J] . Mark N. Horenstein,Patrick R. Stone. Journal of Electrostatics . 2001

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