A high temperature no-co-fired ceramic pressure sensor based on Zirconia（ Zr O2） is designed. Based on the existing low temperature co-fired ceramic（ LTCC） process

the improved high-temperature no-co-fired technology is used to fabricate ceramic sensor. That is to say that the sensor substrate is firstly fabricated

and then the metallic circuit of the sensor is realized. The proposed method solves the problems of thermal expansion coefficient mismatch of high-temperature sintering materials. Read-out of sensor signals use two inductive coupling methods

which enables non-contact pressure measurement. The fabricated sensor has pretty stable mechanical properties under high temperatures. The results show that the resonance frequency of sensor decreases with the increase of pressure

its response sensitivity of the resonance frequency to pressure is about 491. 10 k Hz / bar.