Cell array chips have promising applications in biomedical field such as cell biology study and drug screening. To deal with the limitation of chemical modifications on chips for cell immobilization

a method with merely changing topography is carried out. Based on MEMS technology

superhydrophobic micro-nano-scale is formed on silicon wafer by DRIE and the surface turns superhydrophilic after thermal oxidation; surfaces with different topographies are fabricated by controlling the BOE etching time of Si O2. Circulating tumor cells adhesion efficiencies on substrates are calculated and interaction between cells and substrate is observed in SEM

then the reason of influence of rough surface on cell adhesion is discussed. Experimental results show that surface of Si O2 substrates at micro-and nano-scale fabricated by DRIE and thermal oxidation can greatly promote cell adhesion

which can be applied in cell array chip design.