In order to study application of multiferroic nano-fiber in pressure sensor

a piezoelectric pressure sensor based on sensitive materials of multiferroic nano-fibers is designed by using micro-electro-mechanicalsystems（ MEMS） technology and electrospinning technology. Piezoelectric properties of single nano-fiber are analyzed by finite element analysis software

and it is derived that the smaller the diameter of nano-fibers is

and the longer the length is

that is

the larger distance between electrodes is

the higher the potential at fiber end and the sensitivity are. The structure size and process flow of sensor are designed

and then a sample sensor is fabricated. The masking layer protection problems are analyzed during deep silicon etching

feasible process is proposed.