Propose a multiscale MEMS switch that this new-type of MEMS high-g value switch can detect impact value of different level of discrete which can reach up to 40 000 gn. On the basis of contact damping model

different acceleration value are analyzed and test. By the Hopkinson bar calibration in experiment

MEMS switch can realize calibration response to 37 000 gnacceleration signal at the most extent

and average value of test is consistent with simulation value

the maximum deviation is less than 5 %.