基于QCM的不同形貌ZnO的湿敏性能研究

王虎; 曹雯; 谢娟; 段明

doi:10.13873/J.1000-9787(2015)11-0056-03

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基于QCM的不同形貌ZnO的湿敏性能研究

研究与探讨 | 更新时间：2025-09-11

- 基于QCM的不同形貌ZnO的湿敏性能研究
- Research on humidity sensitive properties of ZnO with different morphologies based on QCM
- 传感器与微系统 2015年34卷第11期页码：56-58+62
- 作者机构：
  
  1. 西南石油大学材料科学与工程学院
  2. 西南石油大学油气藏地质及开发工程国家重点实验室
  3. 西南石油大学化学化工学院
- 作者简介：
- 基金信息：
  
  教育部新世纪优秀人才支持计划资助项目（NCET—13—0983）;四川省教育厅重点项目（13ZA0183）;四川省科技厅应用基础项目（2014JY0059）
- DOI：10.13873/J.1000-9787(2015)11-0056-03
  中图分类号： O614.241;TP212
- 纸质出版：2015
- 稿件说明：
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[1]王虎,曹雯,谢娟,段明.基于QCM的不同形貌ZnO的湿敏性能研究[J].传感器与微系统,2015,34(11):56-58+62.

WANG Hu, CAO Wen, XIE Juan, et al. Research on humidity sensitive properties of ZnO with different morphologies based on QCM[J]. 2015, 34(11): 56-58+62.
[1]王虎,曹雯,谢娟,段明.基于QCM的不同形貌ZnO的湿敏性能研究[J].传感器与微系统,2015,34(11):56-58+62. DOI： 10.13873/J.1000-9787(2015)11-0056-03.

WANG Hu, CAO Wen, XIE Juan, et al. Research on humidity sensitive properties of ZnO with different morphologies based on QCM[J]. 2015, 34(11): 56-58+62. DOI： 10.13873/J.1000-9787(2015)11-0056-03.

摘要

通过水热法制备了粒状和片状两种不同形貌的Zn O

以这两种形貌的Zn O修饰QCM作为湿度传感器

结合饱和盐溶液法（相对湿度:11%

5%RH）和H2O分子在Zn O上的吸/脱附机制对此新型压电传感器的湿敏性能（线性度、响应时间和回复时间）进行评价和研究。实验结果表明:粒状Zn O修饰的QCM传感器相较于片状Zn O修饰的QCM传感器线性度更好

响应时间和恢复时间更短

且该型传感器在低湿条件（33%

55%RH）恢复时间大于响应时间而在高湿条件（75%

85%

95%RH）恢复时间小于响应时间。实验和理论研究说明:Zn O微观形貌对该型传感器湿敏性能至关重要

而H2O分子在Zn O上的吸/脱附机制决定了其恢复/响应时间随湿度变化的技术特点。

Abstract

Hydrothermal method is employed to prepare two different morphologies Zn O

particles and sheets

then methods of saturated aqueous salt solutions with 11 %

95 % RH and theory of H2 O adsorption / desorption on Zn O surface are adopted to evaluate and study humidity sensing properties

such as linearity

response time and recovery time of these new type piezoelectric sensors

namely QCMs coated with Zn O. The results show that QCMs coated with Zn O particles have better linearity

shorter response time and recovery time than QCMs coated with Zn O sheets; recovery time is larger than response time in low-humidity condition with 33 %

55 % RH whil

e their relative relationship is diametrically opposed in high-humidity condition with 75 %

85 %

95 % RH. Experimental and theoretical studies illustrate that humidity sensitive property of QCMs coated with Zn O largely depends on Zn O morphology; while response / recovery time change over humidity essentially depends on H2 O adsorption /desorption mechanism on Zn O surface.

关键词

Keywords

references

基于金属有机框架化合物修饰的QCM湿度传感器 [J]. 郑倩,徐芬,孙立贤,焦成丽,张箭. 传感器与微系统 . 2013(03)

基于LiCl湿敏涂层的QCM湿度传感特性的研究 [J]. 蒙成,童筱钧,方颀,刘铎. 传感器与微系统 . 2012(03)

Highly sensitive humidity sensor based on quartz crystal microbalance coated with ZnO colloid spheres [J] . Juan Xie,Hu Wang,Yuanhua Lin,Ying Zhou,Yuanpeng Wu. Sensors & Actuators: B. Chemical . 2013

Humidity sensing properties of ZnO colloid crystals coated on quartz crystal microbalance by the self-assembly method [J] . Juan Xie,Hu Wang,Yuanhua Lin,Ying Zhou,Yuanpeng Wu. Ceramics International . 2012

Humidity sensors based on ZnO/TiO 2 core/shell nanorod arrays with enhanced sensitivity [J] . Leilei Gu,Kaibo Zheng,Ying Zhou,Juan Li,Xiaoliang Mo,Greta R. Patzke,Guorong Chen. Sensors & Actuators: B. Chemical . 2011 (1)

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