Aiming at the difficulty of the large range nano displacement precision measurement

a new type nanometer time grating sensor is proposed. As for submicro precision of large range

high-precision displacement sensor

consistent manufacture in macro-scale range periodic structure of unit are the key to ensure reliability and high precision measurement of displacement sensor. Aiming at problem raised above

a new high-precision automatic exposure splicing technology is adopted

fabricate and achieve large range scale pattern transfer

and combined with micro-nano fabrication methods

the sub-micron level precision time grating sensor manufacturing is realized. The experimental results show that the prototype can work as expected

and peak of measurement error is within 500 nm.