Piezoelectric micromachined modal gyroscope( PMMG) is a novel type of all-solid state gyroscope
which utilizes the high-order resonance mode of the PZT body as its reference vibration and thus obtain excellent properties of anti-shock and anti-vibration. Obtain the optimized reference vibration mode is essential to improve the performance of the gyroscope
but most papers didn’t cover the influence of packaging on reference vibration.Influence of supporting point position and contact area in installing of piezoelectric vibrator on reference vibration is analyzed by finite element method( FEM)
and analysis results show that the variation of supporting point position has a greater impact on reference vibration mode of gyro compared with the variation of contact area. The research provides theoretical bisis for mounting method of PMMG.
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references
Does greater piezo-resistive transduction give rise to higher anchor loss in a square-extensional mode micromechanical resonator? [J] . Yuanjie Xu,Joshua E.-Y. Lee. Sensors & Actuators: A. Physical . 2013