Based on the MEMS technology

a comb-shaped push-pull driving micro-magnetic sensor is designed and fabricated. When measuring the external magnetic field

the resonator of sensor works in contracting and extensional modal

therefore the surrounding area by double-layer Al coils will change

as a result

magnetic flux in loop coils vary. According to the principle of electromagnetic induction

induced electromotive force will generate proportional to magnetic field at the two terminals of the coils. The experimental results show that the sensitivity of magnetic sensor in air environment is 0. 846 99 m V / T

and the nonlinearity is-0. 265 %. Using the differential circuit

reduce the zero offset voltage of magnetic sensor

which is only 0. 001 9 m V.