Design a silicon micro-valve-based micro-fluidic chip and optimal design of V-shape actuator is carried out based on electro-thermal coupling theory. By constructing the optimal model for temperature distribution

the V-shape electro-thermal micro-actuator with variable section is designed for micro fluidic silicon micro-valves

and multi-physical field simulation is carried out on actuator after optimization. Results show that compared with actuators with constant section

for same displacement

the required highest temperature rise of the optimized actuator is reduced by 7. 14 %

it shows more uniform distributions of temperature and stress in which means better thermal equilibrium and structural stability.