Aiming at problem that humidity hysteresis of polymer capacitive humidity sensitive element can not be completely compensated by circuit

propose a method to reduce hysteresis from humidity sensitive element. The experimental verification is accomplished mainly based on two aspects that are the fabrication process and sensitive material selection

and property test and data analysis on the completed sensor samples are given. Experimental results and indicate that the humidity hysteresis can be reduced through fabrication process control and sensitive material modifying

humidity hysteresis prior to 1. 5 % RH. Using this method

hysteresis compensation by follow-up circuit is not necessary.