A new type of triaxial vibration sensor is designed

which has a small overall size of only 27 mm ×27 mm × 21 mm

light weight

good rigidity

and it can be easily installed and used. The idea of flexible-rigid PCB is introduced into the structure design of circuit board

integrating four rigid boards with three flexible boards realize high reliable connection of interface and infinitely saves the inner space and easy to realize miniature of the sensor. The design of four layered rigid boards and double layered flexible board implements that small circuit board can include multi signal channel. Three rigid boards with sensitive chip are agglutinated to the three orthogonal inner surface of the shell structure using acrylic adhesive

which can realize measurement of three directions vibration signal by one measuring point. Through test verification of characteristic index test

frequency response of triaxial vibration sensor applying the new structure design can be reach 5 k Hz.