At present

most of capacitive MEMS ultrasonic sensor（ CMUS） are used for both transmission and receiving

but there is a big difference on structure of the two operating modes

so the performance cannot obtain optimal under consideration of transmitting and receiving properties in structure design. Moreover

parasitic capacitance of traditional CMUS is relatively big. In order to solve these problems

based on the idea of transmitreceive separate mode

design a CMUS which is only used for ultrasonic receiving. The leads of top and bottom electrodes are stagger with each other and the connecting line between inter cells are in a cross stagger manner to reduce the parasitic capacitance. Theoretical analysis and ANSYS simulation show that the best working voltage is586 V and sensitivity is 174. 2 fF /Pa

which meets the requirements of current ultrasonic receiving sensor.