Influenced by manufacturing technology and measurement environment

especially temperature

output of Si piezo-resistive pressure sensor mostly is non-linear. So it is necessary for sensor to accurately calibrate

test and temperature compensation

firstly

fabricate a digital air pressure sensor which contains high precision AD and microprocessor to collect datas

then analyze test equipment and decide to adopt scheme of variable temperature at constant pressure. This method is very efficient and can describe features of temperature and output of sensor exactly. Finally

temperature compensation is carried out on microcontroller by least square method

output precision of sensor after compensation meet demand of application.