An optical acoustic sensor based on Si—MEMS acoustics-sensitive configuration is designed and the principle of optical modulation is based on optical intensity modulation

the miniature sensitive structure uses acoustics-sensitive membrane chip

which has corrugated configuration with low stress. Test research on coupling technique between micro sensitive structure and optical fiber is carried out

and optical parameters are optimized

and sensor specimen is fabricated. Test shows that sensitivity reaches 80 mV /Pa.