基于驱动电流的水下热敏剪应力微传感器灵敏度研究

朱鹏飞; 马炳和; 姜澄宇; 邓进军; 王云龙

doi:10.13873/J.1000-9787(2014)09-0052-03

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基于驱动电流的水下热敏剪应力微传感器灵敏度研究

研究与探讨 | 更新时间：2025-09-11

- 基于驱动电流的水下热敏剪应力微传感器灵敏度研究
- Research on sensitivity of thermal micro sensor for underwater shear stress measurement based on drive current
- 传感器与微系统 2014年33卷第9期页码：52-54+61
- 作者机构：
  
  西北工业大学空天微纳系统教育部重点实验室
- 作者简介：
- 基金信息：
  
  国家重大科学仪器设备开发专项资助项目（2013YQ040911）
- DOI：10.13873/J.1000-9787(2014)09-0052-03
  中图分类号： TP212
- 纸质出版：2014
- 稿件说明：
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[1]朱鹏飞,马炳和,姜澄宇,邓进军,王云龙.基于驱动电流的水下热敏剪应力微传感器灵敏度研究[J].传感器与微系统,2014,33(09):52-54+61.

ZHU Peng-fei, MA Bing-he, JIANG Cheng-yu, et al. Research on sensitivity of thermal micro sensor for underwater shear stress measurement based on drive current[J]. 2014, 33(9): 52-54+61.
[1]朱鹏飞,马炳和,姜澄宇,邓进军,王云龙.基于驱动电流的水下热敏剪应力微传感器灵敏度研究[J].传感器与微系统,2014,33(09):52-54+61. DOI： 10.13873/J.1000-9787(2014)09-0052-03.

ZHU Peng-fei, MA Bing-he, JIANG Cheng-yu, et al. Research on sensitivity of thermal micro sensor for underwater shear stress measurement based on drive current[J]. 2014, 33(9): 52-54+61. DOI： 10.13873/J.1000-9787(2014)09-0052-03.

摘要

驱动电流是热敏式剪应力微传感器的一个重要参数。增大驱动电流可以提高传感器的灵敏度

但传感器的安全工作温度又限制了驱动电流的增大。研究了如何基于驱动电流来最大程度地提高传感器灵敏度。从理论上分析了传感器灵敏度随剪应力输入的变化规律。通过静水中的I-V特性测试实验

确定了传感器在水下工作的最大允许驱动电流。通过电压—剪应力特性测试实验

验证了传感器灵敏度与驱动电流的关系

得到了传感器在最大允许驱动电流激励下的灵敏度。研究

发现最大允许驱动电流可以使传感器在剪应力为0.2Pa时的灵敏度达到23.8mV/Pa。

Abstract

Drive current is an important parameter of thermal shear stress micro sensor. Increasing drive current is helpful for enhancing its sensitivity

however

there must be a maximum allowable drive current for the sake of safe working temperature of the sensor. How to make full use of drive current to increase sensitivity of sensor is studied. Variation rule of sensitivity of sensor with shear stress input is studied by theoretical analysis. The effect of drive current on the sensitivity of sensor is validated by analyzing output voltage-shear stress relationship

the maximum allowable drive current of the sensor working underwater is determined by I-V characteristic test. It can improve sensitivity of sensor to 23. 8 mV /Pa when shear stress input is 0. 2 Pa.

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references

基于柔性热膜传感器的流体壁面剪应力测量系统 [J]. 肖同新,马炳和,邓进军,李雁冰,王毅. 传感器与微系统 . 2013(07)

传感器与测试技术[M]. 高等教育出版社 , 李晓莹主编, 2004

A MEMS multi-sensor chip for gas flow sensing [J] . Yong Xu,Chen-Wei Chiu,Fukang Jiang,Qiao Lin,Yu-Chong Tai. Sensors & Actuators: A. Physical . 2004 (1)

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A flexible micromachine-based shear-stress sensor array and its application to separation-point detection [J] . Fukang Jiang,Gwo-Bin Lee,Yu-Chong Tai,Chih-Ming Ho. Sensors & Actuators: A. Physical . 2000 (3)

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