A robust design method for piezoresistive accelerometers is proposed.On the basis of an indepth study of the structure

working principle

and influencing factors such as design parameters and stochastic parameters of the accelerometer

a robust design model based on a stochastic model is established

and the corresponding algorithmic program is written to solve the robust design model.The results show that the robust design method can not only ensure that the piezoresistive accelerometer has a high sensitivity without sacrificing the intrinsic frequency

but also ensure the stability of the accelerometer and improve the yield.