Microfabrication and electrochemical energy storage properties of zinc oxide(ZnO) anode thin film material for all-solid-state thin-film lithium-ion microbatteries are researched.ZnO thin film is fabricated by radio frequency magnetron sputtering.X-ray diffraction(XRD)

scanning electron microscopy(SEM) and energy dispersive X-ray spectroscopy (EDS) are used to characterize the prepared ZnO thin film.The prepared ZnO thin film presents a nanoparticle structure and grows preferentially along the(002)crystal plane parallel to the substrate.The cyclic voltammetry (CV)and constant current charge-discharge tests indicate that it has good electrochemical stability and reversibility of electrochemical reaction

and the electrochemical impedance spectroscopy (EIS) test shows that the film exhibits favorable electrochemical reaction kinetics.The results demonstrate that the ZnO anode thin film fabricated by magnetron sputtering has a dense texture

tight adhesion to the substrate

and high crystallinity

along with excellent electrochemical energy storage performance.Thus

it can be used as an anode thin film material for all-solid-state thin-film lithium-ion microbatteries．