The MEMS high

g

accelerometer investigated is a crucial electronic component capable of detecting intense vibration and significant impact signals.Firstly

the piezoresistive principle of the piezoresistive accelerometer is studied

and the sensitive structure of the proposed accelerometer is designed.Subsequently

according to the stress variation rule of the sensitive structure

the layout of the piezoresistors is determined

and the subsequent hardware electrical connection relationship is established.Furthermore

the processing flow of the designed accelerometer structure is thoroughly analyzed

and essential packaging is carried out.The simulation results indicate that the measurement range of th

e accelerometer reaches 10000

g

n

with a sensitivity of 39.62μV/

g

n

and a firstorder natural frequency of 28049Hz.