In order to improve the sensitivity of the microcantilever sensor

two types of microcantilever structures with nanopore arrays are designed.In order to verify the influence of the two structural designs on the sensitivity

the finite element analysis method is used to conduct modeling and dynamic and static analysis on the two nanopore array structures.The results show that the free-end bending displacement of double-sided half-punched nanostructure increases by 7.5% compared with single-sided half-punched nanostructure.In addition

by comparing the bending displacement values of the two structures under different geometric parameters of nanopores

the optimal geometric parameters of the nanopore are determined

and the curve law of the deflection displacement values at the microcantilever free-end affected by nanopores is obtained.The research results provide a new design idea and method for the microcantilever structure

and effectively improve the sensitivity of the structure.