ZHU Jianting, FAN Lei, QI Xue, et al. Research on compensation for silicon-based pressure sensors based on composite interpolation algorithm[J]. 2026, 45(3): 19-24.
ZHU Jianting, FAN Lei, QI Xue, et al. Research on compensation for silicon-based pressure sensors based on composite interpolation algorithm[J]. 2026, 45(3): 19-24.DOI:
The measurement accuracy of multi-channel pressure acquisition systems is severely restricted by the temperature drift of silicon-based piezoresistive pressure sensors.To address this issue
a compensation algorithm that integrates Lagrange interpolation with cubic spline interpolation is proposed.During the offline phase
a segmental Lagrange interpolation strategy is employed to construct a temperature-to-voltage mapping model
while a cubic spline interpolation model is built to establish the nonlinear mapping relationship between voltage and pressure.In the real-time phase
the pre-established models are queried to rapidly identify the pressure interval and compute the compensation value.To verify the algorithm’s effectiveness
a multi-channel pressure test system is designed
and calibration and compensation verification experiments are carried out in a temperature range of 30℃ to 80℃.Experimental results demonstrate that after compensation
the sensor’s nonlinear error in the full temperature range is reduced to below 0.0344%FS
and the accuracy reaches 0.1039%FS.Compared with methods utilizing polynomial fitting and back propagation(BP)neural networks
the proposed algorithm not only enhances compensation precision but also maintains higher computational efficiency.