A parallel-symmetric low-coupling two-degree-of-freedom nanopositioner is designed and a two-dimensional calibration method is proposed to solve the coupling crosstalk error due to the deformation of the sensor pedestal during the nanopositioner actuation process.The nanopositioner uses a lever mechanism as the motion amplification mechanism and is spatially symmetrically arranged.Furthermore

the nanopositioner utilizes an L-type flexure as a motion-guided decoupling mechanism

resulting in high resonant frequency and low coupling characteristics.Based on the pedestal micro-deformat

ion characteristics of the nanopositioner

a two-dimensional calibration compensation matrix is proposed to suppress the crosstalk between two axes caused by the pedestal micro-deformation.The experimental results indicate that the two-degree-of-freedom nano-positioner has an output travel of 36.6μm on the

X

-axis and 36.35μm on the

Y

-axis

respectively.The resonance frequencies are 1.031kHz and 1.042kHz

respectively

and the open-loop coupling errors are 0.43% and 0.33% in the

X

and

Y

axes

respectively.The calibrated closed-loop system reduces the coupling crosstalk errors of the

X

and

Y

axes to 1/8 and 1/12 of the uncalibrated values

while improving the positioning precision of the two axes by 19.4 and 12.8 times

respectively.