In order to improve the sensitivity of MEMS accelerometer

a novel microlever enhanced MEMS accelerometer is proposed and designed.Double-pendulum accelerometers with and without microlever structures are simulated and calculated

by using the finite element analysis tool.The results show that the equivalent stress concentration of the torsion beam after increasing the lever structure is only 47% of the equivalent stress level of the non-lever structure

and the displacement of the proof mass is 3.5 times of the non-lever structure.Further

routing of the double pendulum accelerometer based on lever is designed and fabricated

and the sensitive structure is integrated with

the signal detection circuit.Test results show that sensitivity of the novel accelerometer is up to 179.13mV/

g

and the Allan deviation by is 2.15m

g

/h zero-bias stability calculation.The research results can provide reference for the research of improving the sensitivity of MEMS accelerometers.