Flexible sensors have huge application potential in wearable devices

human-computer interaction

medical

robotics and other fields.However

the preparation of flexible sensors is restricted by material characteristics and process manufacturing costs.In this paper

a flexible capacitive sensor is prepared by combining selective laser-induced metallization and packaging technology

using polydimethylsiloxane(PDMS)which has excellent mechanical properties as dielectric layer

and attaching a copper layer to the surface of flexible polyimide(PI)as the plate.The test results of its key sensing characteristics verify the feasibili

ty of its application.The results show that the flexible capacitive sensors have good sensitivity(6.29kPa

-1

)

fast response time(375~625ms)

low hysteresis(Δ3.52)and good cyclic stability(not less than 300 cycles).Finally

by arranging it on the skin surface and the claw of a robotic arm

it is proved that this method and the prepared flexible capacitive sensors have diversified application prospects in electronic skin

wearable devices

robotics and other fields.