华东理工大学 机械与动力工程学院,上海,200237
纸质出版:2025
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江悠阳, 廖兴雨, 杨定坤, 等. 光致振动响应在减反微结构作用下的研究[J]. 传感器与微系统, 2025,44(12):64-68.
JIANG Youyang, LIAO Xingyu, YANG Dingkun, et al. Study on photo-induced vibrational response under the action of reduced-reflection microstructure[J]. 2025, 44(12): 64-68.
激光驱动具有非接触、可调可控等优势,应用前景广泛。建立了激光激励的热弹耦合模型,提出了一种针对光热非线性振动提高能量效率的方法,设计了一种高频脉冲周期序列用于激光激励,实现了光致振动在非线性模态交互作用下的大幅激发,将悬臂梁体积功率比增加几千倍,振幅扩大至毫米级。研究了不同激光加工间距下的减反微结构的形貌及反射率,并探究该结构对响应振幅的影响。实验证明:利用减反微结构降低材料反射率,可提高光热转换效率,进而增强非线性低频响应,有效提高金属光致振动梁在厚度方向上的振幅(7至30倍)。拓宽了光致振动在半导体、医药和精密加工领域上的应用范围。
Laser driving has the advantages of non-contact
adjustability and controllability
and has a wide range of application prospects.A thermoelastic coupling model for laser excitation is constructed.A method to improve energy efficiency for photothermal nonlinear vibrations is proposed
and a high-frequency pulse cycle sequence is designed for laser excitation.This achieves a large excitation of photoinduced vibrations in the presence of nonlinear mode interactions
increasing the cantilever beam volume-to-power ratio by a factor of several thousand and expanding the amplitude to the millimeter scale.The morphology and reflectivity of the reduced-reflection microstructure are studied under different laser processing spacings
and the effect of the structure on the response amplitude is investigated.It is demonstrated that the utilization of the reduced-reflection microstructures to reduce the material reflectivity can improve the photothermal conversion efficiency
so as to enhance the nonlinear low-frequency response and effectively increase the amplitude of the metal photo-induced vibrational beam in thickness direction(by a factor of 7 to 30).The application scope of photo-induced vibration in the fields of semiconductors
pharmaceuticals
and precision machining is broadened.
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