With the rapid development of aerospace

atomic energy technology

metallurgy and petrochemical industries

there is an urgent need for long-term stable measurements at 800℃ high temperature environment.A small size

high temperature resistant platinum resistor thin film sensor is proposed using magnetron sputtering method

adhesion layer chromium(Cr)and sensitive layer platinum are deposited on the Al

2

O

3

ceramic substrate

and through annealing treatment on platinum film and adding a surface protective layer (Al

2

O

3

and AlN)

to enhance its high temperature resis

tance characteristic.Meanwhile

the high temperature performance of the sensor is tested.The results show that the temperature coefficient of resistance(TCR)of the platinum resistor thin-film temperature sensor is 5630×10

-6

℃

the response time of the sensor is 26.4s

the sensor can measure steadily and continuously in 800℃ environment.The sensor can be widely used in aerospace

automotive industry and other high-temperature fields.