The spatial benchmark provides a unified reference framework for describing positions and spatial relationships on Earth

and is an important tool for human understanding of the world.The establishment of high-precision spatial benchmarks relies on the support of precision measurement technology.In recent years

quantum precision measurement technology has developed rapidly

and atomic interferometric sensors

in particular

have advanced significantly.However

their excessively large volume and weight limit the application of atomic interferometry sensors in the establishment of spatial benchmarks.This paper reviews the key microfabrication technologies and research progress of on-chip atomic interferometric sensors

summarizes the development bottlenecks of key microfabrication technologies for on-chip atomic interferometric

and points out the direction for the development of on-chip atomic interferometric sensors.