The deficiencies in accuracy

stability and adaptability of existing pressure and flow measurements are addressed by optimizing the sensitive structure and packaging design of the differential pressure flow sensor core.The differential pressure gas flow sensor uses Bernoulli’s principle to design a double-balanced torsion beam +T-beam structure resonant differential pressure sensitive core. Compared with the traditional single-beam structure

the

Q

factor is increased from 15084 to more than 37124 by adjusting the structural parameters

effectively ensuring high performance. Stress isolation is achieved through borosilicate glass

and the thermal stress generated on the sensiti

ve film is reduced to 3.375MPa at 125℃.The sensitive core is subjected to thermal

electrical

fatigue and other reliability tests before performance testing

with an accuracy better than ±0.1%FS.The results show that the resonant sensitive core has obvious advantages over the traditional piezoresistive differential pressure in terms of accuracy and is more suitable for the extremes environment and high requirements environment.