To measure low flow rate gas

a serpentine platinum（Pt）film on a low thermal conductivity glass substrate employing lift-off process

constituting a heat distribution type micro-electro-mechanical-system(MEMS)flow rate sensor.The dimensions of the sensor are 10mm×10mm

and at room temperature

the heating resistance is 247Ω

and the temperature sensing resistance is 419.7Ω.It is found that the temperature sensing resistance exhibits excellent temperature-resistance linearity (

R

2

≥0.999)

By varying the spacing between the heating resistor and the temperature sensing resistor

measurement range of 0~1.0m/s can be achieved.In the low flow rate range of 0~0.4

m/s

the sensor has high sensitivity.The sensor has advantages of simple mechanical structure

small size

low cost

and suitability for mass production

and can be widely applied in microflow rate measurement fields.