1. 宁波大学 信息科学与工程学院,浙江,宁波,315211
2. 中国电子科技集团公司第四十九研究所,黑龙江,哈尔滨,150028
3. 电子科技大学 航空航天学院,四川,成都,611731
纸质出版:2025
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俞凯戈, 蒋晓晴, 程振乾, 等. 电流型氮氧化物传感器主泵腔室结构分析与优化[J]. 传感器与微系统, 2025,44(11):23-27.
YU Kaige, JIANG Xiaoqing, CHENG Zhenqian, et al. Analysis and optimization of main pumping chamber structure of current-type nitrogen oxide sensor[J]. 2025, 44(11): 23-27.
本文阐述了氮氧化物(NO
x
)传感器主泵的结构机理,并利用COMSOL Multiphysics软件对主泵模型进行有限元分析(FEA),研究了腔室(第一扩散气道和第一空腔)不同尺寸对主泵泵氧效率的影响,并进行了结构尺寸优化。结果显示:第一扩散气道和第一空腔尺寸的改变会对第一空腔内的氧气(O
2
)浓度产生影响。优化后主泵模型的第一空腔内O
2
浓度最大差异值从初始的6460.8×10
-6
降低至245.7×10
-6
,降幅达26.3倍,显著提高了主泵的泵氧效率,为后续NO
x
的精确测量提供了保障。优化后的主泵模型泵氧响应时间略有增加,最长为0.38s,但该时长对NO
x
传感器整个工作响应时间影响不大。
The structural mechanism of main pump in nitrogen oxides(NO
x
)sensors is elucidated
and the COMSOL Multiphysics software is utilized to conduct finite element analysis(FEA)of the main pump model.Influence of different dimensions of chamber(the first diffusion channel and the first cavity)on the oxygen pumping efficiency of the main pump is studied and structural size optimization is performed.The results demonstrate that changes in the dimensions of the first diffusion channel and the first cavity affect the oxygen(O
2
)concentration within the first cavity.After optimization
the maximum difference of O
2
concentration within the first cavity of the main pump model is reduced from the initial value of 6460.8×10
-6
to 245.7×10
-6
a decrease of 26.3 times
significantly improve oxygen pumping efficiency of the main pump
ensuring accurate measurement of NO
x
in subsequent stages.Although the optimized main pump model exhibits a slight increase in oxygen pumping response time
with the longest being 0.38s
this duration has minimal impact on the overall operational response time of the NO
x
sensor.
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