A highly sensitive capacitive pressure sensor based on the electrical double-layer principle is proposed

and the influence of the concentration of H

3

PO

4

ionic liquid on the double-layer capacitance value is studied.In addition

the influence mechanism of the dielectric layer microstructure based on the inverted mold of poplar leaf on the sensing performance is designed and analyzed.Finally

based on the working mechanism of self-capacitance proximity sensor

a tactile ending with proximity-pressure sensing function is constructed

and the tactile ending is applied to two kinds of tasks

which are hardness detection of grasped o

bjects and pressing operation of self-locking button switches.Tests on the static and dynamic characteristics of the sensor show that it has high sensitivity of 28.7kPa

-1

and wide working pressure range of 0~40kPa.The application results show that the introduction of the tactile ending enables the robot to quickly distinguish objects with different hardness.The success rate of the self-locking button switch is significantly improved to 97% with the help of tactile endings.